{"id":1012,"date":"2019-09-17T10:04:23","date_gmt":"2019-09-17T01:04:23","guid":{"rendered":"https:\/\/itonium.net\/wp-test\/?p=1012"},"modified":"2020-07-01T19:36:58","modified_gmt":"2020-07-01T10:36:58","slug":"mocvd-with-selective-self-oriented-growth-of-monoclinic-hafnia-film-for-environmental-barrier-coating","status":"publish","type":"post","link":"https:\/\/itonium.net\/wp-test\/mocvd-with-selective-self-oriented-growth-of-monoclinic-hafnia-film-for-environmental-barrier-coating.html","title":{"rendered":"\u8010\u74b0\u5883\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5411\u3051\u30cf\u30d5\u30cb\u30a2\u306e\u9078\u629e\u7684\u81ea\u5df1\u914d\u5411\u6210\u9577 :: Selective self-oriented growth of hafnia for environmental barrier coating (Ceram. Int., 2020)"},"content":{"rendered":"\n

\u677e\u672c\u662d\u6e90\u541b (M2) \u306e\u7814\u7a76\u6210\u679c\u304c\u3001Ceramics International \u8a8c\u306b\u53d7\u7406\u3055\u308c\u307e\u3057\u305f\u3002\u8ad6\u6587\u984c\u76ee\u306f\u3001\u300cHighly self-oriented growth of (020) and (002) monoclinic HfO2<\/sub> thick films using laser chemical vapor deposition\u300d\u3067\u3059\u3002<\/p>\n\n\n\n

HfO2<\/sub> (\u9178\u5316\u30cf\u30d5\u30cb\u30a6\u30e0) \u306f\u3001\u878d\u70b9\u304c\u9ad8\u304f\u3001\u976d\u6027\u3084\u906e\u71b1\u6027\u306b\u512a\u308c\u308b\u9ad8\u6e29\u69cb\u9020\u6750\u6599\u3067\u3059\u3002\u5207\u524a\u5de5\u5177\u5411\u3051\u306e\u786c\u8cea\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3084\u822a\u7a7a\u6a5f\u5411\u3051\u30bf\u30fc\u30dc\u30d5\u30a1\u30f3\u30a8\u30f3\u30b8\u30f3\u306e\u8010\u74b0\u5883\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3078\u306e\u5fdc\u7528\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002\u677e\u672c\u541b\u306f\u3001HfO2<\/sub>\u306e\u5316\u5b66\u6c17\u76f8\u6790\u51fa (CVD: Chemical Vapor Deposition) \u306b\u95a2\u3059\u308b\u7814\u7a76\u3092\u9032\u3081\u308b\u4e2d\u3067\u3001\u5358\u659c\u6676HfO2<\/sub>\u304c\u81ea\u767a\u7684\u306b\u7d50\u6676\u65b9\u4f4d\u3092\u63c3\u3048\u3066\u6c17\u76f8\u6210\u9577\u3059\u308b\u81ea\u5df1\u914d\u5411\u6210\u9577\u52b9\u679c (self-oriented growth) \u3092\u898b\u51fa\u3057\u307e\u3057\u305f\u3002 <\/p>\n\n\n\n

\u672c\u8ad6\u6587\u3067\u306f\u3001\u71b1CVD\u6cd5\u3068\u30ec\u30fc\u30b6\u30fc\u52a0\u71b1CVD\u6cd5\u3092\u7528\u3044\u3066HfO2<\/sub>\u819c\u3092\u5408\u6210\u3057\u3001\u305d\u308c\u305e\u308c\u306eCVD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u3001\u6210\u819c\u6e29\u5ea6\u304cHfO2<\/sub>\u819c\u306e\u7d50\u6676\u914d\u5411\u3084\u5fae\u7d30\u7d44\u7e54\u3001\u6210\u819c\u901f\u5ea6\u306b\u4e0e\u3048\u308b\u5f71\u97ff\u3092\u660e\u3089\u304b\u306b\u3057\u307e\u3057\u305f\u3002\u7279\u306b\u3001c<\/em>\u9762\u914d\u5411HfO2<\/sub>\u819c\u306b\u3064\u3044\u3066\u306f\u3001\u900f\u904e\u578b\u96fb\u5b50\u9855\u5fae\u93e1\u3092\u7528\u3044\u305f\u7d44\u7e54\u89b3\u5bdf\u3092\u884c\u3044\u3001c<\/em>\u9762\u914d\u5411HfO2<\/sub>\u819c\u3092\u69cb\u6210\u3059\u308b\u67f1\u72b6\u6676\u306f\u5358\u7d50\u6676\u69d8\u3067\u3042\u308b\u3053\u3068\u3092\u660e\u78ba\u306b\u3057\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u81ea\u5df1\u914d\u5411\u6210\u9577\u52b9\u679c\u3092\u3001\u7d50\u6676\u5b66\u306e\u89b3\u70b9\u304b\u3089\u8003\u5bdf\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

<\/div>\n\n\n\n
\"Graphical
Graphical abstract for \u201cSelective self-oriented growth of hafnia\u201d<\/em> <\/figcaption><\/figure>\n\n\n\n
<\/div>\n\n\n\n

\u4f0a\u85e4\u6681\u5f66\u7814\u7a76\u5ba4\u3067\u306f\u5f15\u304d\u7d9a\u304d\u3001CVD\u6cd5\u306b\u3088\u308a\u5408\u6210\u3057\u305fHfO2<\/sub>\u306e\u6a5f\u68b0\u7684\u7279\u6027\u3084\u5149\u5b66\u7684\u7279\u6027\u306e\u8a55\u4fa1\u3092\u9032\u3081\u308b\u4e00\u65b9\u3001\u30cf\u30d5\u30cd\u30fc\u30c8\u7cfb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u6750\u6599\u63a2\u7d22\u3092\u884c\u3063\u3066\u3044\u304d\u307e\u3059\u3002<\/p>\n\n\n\n

\u5c1a\u3001\u672c\u7814\u7a76\u6210\u679c\u306e\u4e00\u90e8\u306f\u3001\u65e5\u672c\u5b66\u8853\u632f\u8208\u4f1a\u79d1\u7814\u8cbb\u30fb\u57fa\u76e4\u7814\u7a76 (B) (17H03426) \u306e\u652f\u63f4\u3092\u53d7\u3051\u3066\u5f97\u3089\u308c\u305f\u3082\u306e\u3067\u3059\u3002 <\/p>\n\n\n\n


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S. Matsumoto, Y. Kaneda, A. Ito, Highly self-oriented growth of (020) and (002) monoclinic HfO2<\/sub> thick films using laser chemical vapor deposition, Ceramics International. http:\/\/doi.org\/10.1016\/j.ceramint.2019.09.156<\/a>. <\/p>\n\n\n\n

Link to ScienceDirect Topics: hafnium<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\u677e\u672c\u662d\u6e90\u541b (M2) \u306e\u7814\u7a76\u6210\u679c\u304c\u3001Ceramics International \u8a8c\u306b\u53d7\u7406\u3055\u308c\u307e\u3057\u305f\u3002\u8ad6\u6587\u984c\u76ee\u306f\u3001\u300cHighly self-oriented growth of (020) and (002) monoc … <\/p>\n