{"id":1865,"date":"2020-09-24T20:00:00","date_gmt":"2020-09-24T11:00:00","guid":{"rendered":"https:\/\/itonium.net\/wp-test\/?p=1865"},"modified":"2021-01-13T19:53:24","modified_gmt":"2021-01-13T10:53:24","slug":"selection-of-metal-organic-precursors-for-strontium-hafnate","status":"publish","type":"post","link":"https:\/\/itonium.net\/wp-test\/selection-of-metal-organic-precursors-for-strontium-hafnate.html","title":{"rendered":"\u30b9\u30c8\u30ed\u30f3\u30c1\u30a6\u30e0\u30cf\u30d5\u30cd\u30fc\u30c8\u306e\u5316\u5b66\u6c17\u76f8\u6790\u51fa\u306b\u304a\u3051\u308b\u6709\u6a5f\u91d1\u5c5e\u539f\u6599\u306e\u9078\u5b9a :: Selection of metal-organic precursors for strontium hafnate (JCS-Japan, 2021)"},"content":{"rendered":"\n

\u85e4\u6c5f\u6e05\u82b1\u3055\u3093 (M1) \u306e\u7814\u7a76\u6210\u679c\u304c\u3001Journal of the Ceramic Society of Japan \u8a8c\u306b\u53d7\u7406\u3055\u308c\u307e\u3057\u305f\u3002\u8ad6\u6587\u984c\u76ee\u306f\u3001\u300cPrecursor selection for metal\u2013organic chemical vapor deposition of SrHfO3<\/sub> films with Sr(dpm)2<\/sub> and Sr(hfa)2<\/sub>\u300d\u3067\u3059\u3002<\/p>\n\n\n\n

\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u578b\u30b8\u30eb\u30b3\u30cb\u30a6\u30e0\u9178\u5316\u7269\u3084\u30cf\u30d5\u30cb\u30a6\u30e0\u9178\u5316\u7269 (A<\/em>ZrO3<\/sub> \u3084 A<\/em>HfO3<\/sub>: A<\/em> = Ca, Sr \u304a\u3088\u3073 Ba) \u306f\u3001\u71b1\u4f1d\u5c0e\u5ea6\u304c\u4f4e\u304f\u3001\u878d\u70b9\u304c\u9ad8\u3044\u3053\u3068\u304b\u3089\u3001\u71b1\u906e\u853d\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6750\u6599\u3068\u3057\u3066\u671f\u5f85\u3055\u308c\u307e\u3059\u3002\u672c\u7814\u7a76\u3067\u306f\u3001\u512a\u308c\u305f\u906e\u71b1\u6027\u3068\u786c\u5ea6\u3092\u517c\u306d\u5099\u3048\u305f\u6750\u6599\u3068\u3057\u3066SrHfO3<\/sub>\u306b\u7740\u76ee\u3057\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001\u71b1\u906e\u853d\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6cd5\u3068\u3057\u3066\u4e3b\u6d41\u306e\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b9\u30d7\u30ec\u30fc (APS) \u6cd5\u3084\u96fb\u5b50\u30d3\u30fc\u30e0\u7269\u7406\u84b8\u7740 (EB-PVD) \u6cd5\u3092\u542b\u3081\u3001\u3053\u308c\u307e\u3067SrHfO3<\/sub>\u819c\u306e\u6c17\u76f8\u5408\u6210\u306b\u95a2\u3059\u308b\u7814\u7a76\u5831\u544a\u306f\u3042\u308a\u307e\u305b\u3093\u3067\u3057\u305f\u3002<\/p>\n\n\n\n

\u85e4\u6c5f\u3055\u3093\u306f\u3001<\/em>MOCVD\u6cd5\u306b\u3088\u308b<\/em>SrHfO3<\/sub>\u306e\u6c17\u76f8\u5408\u6210\u3092\u63d0\u6848\u3057\u3001\u3053\u308c\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u307e\u305a<\/em>Sr\u6709\u6a5f\u91d1\u5c5e\u5316\u5408\u7269\u539f\u6599\u306e\u9078\u5b9a\u3092\u884c\u3044\u307e\u3057\u305f\u3002\u6211\u3005\u306e\u7814\u7a76\u5ba4\u3067\u306f\u3001<\/em>\u3053\u308c\u307e\u3067Sr\u306eMO\u539f\u6599\u3068\u3057\u3066Strontium bis(dipivaloylmethanate) (Sr(dpm)2<\/sub>) \u3092\u7528\u3044\u3066M\u578b\u30d8\u30ad\u30b5\u30d5\u30a7\u30e9\u30a4\u30c8 (SrM) \u78c1\u6027\u7d50\u6676\u7b49\u306e\u5408\u6210\u3092\u884c\u3063\u3066\u304d\u307e\u3057\u305f\u304c\u3001\u672c\u7814\u7a76\u3067\u306f\u3088\u308a\u9ad8\u3044\u84b8\u6c17\u5727\u3068\u53cd\u5fdc\u6027\u3092\u6709\u3059\u308b Strontium bis(hexafluoroacetylacetonate) (Sr(hfa)2<\/sub>) \u306b\u7740\u76ee\u3057\u3001\u4e21\u539f\u6599\u3092\u7528\u3044\u305f\u6bd4\u8f03\u5b9f\u9a13\u3092\u901a\u3058\u3066\u3001Sr(hfa)2<\/sub>\u539f\u6599\u3092\u7528\u3044\u305fSrHfO3<\/sub>\u306eCVD\u5408\u6210\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

\"\"
Sr(hfa)<\/em>2<\/sub> or Sr(dpm)2<\/sub> <\/figcaption><\/figure>\n\n\n\n

S. Fujie, A. Ito, Precursor selection for metal\u2013organic chemical vapor deposition of SrHfO3<\/sub> films with Sr(dpm)2<\/sub> and Sr(hfa)2<\/sub>, Journal of the Ceramic Society of Japan. https:\/\/doi.org\/10.2109\/jcersj2.20157<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

\u85e4\u6c5f\u6e05\u82b1\u3055\u3093 (M1) \u306e\u7814\u7a76\u6210\u679c\u304c\u3001Journal of the Ceramic Society of Japan \u8a8c\u306b\u53d7\u7406\u3055\u308c\u307e\u3057\u305f\u3002\u8ad6\u6587\u984c\u76ee\u306f\u3001\u300cPrecursor selection for metal\u2013orga … <\/p>\n