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High-speed Deposition of Dense, Dendritic and Porous SiO
Films by Nd:YAG Laser Chemical Vapor Deposition
J. Endo, A. Ito, T. Kimura, T. Goto
Materials Science and Engineering: B 166(3) 225–229 (2010).
Versions of the article
Final form in publisher
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Accepted manuscript in self-archive
To be archived
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