Publications

Articles tagged 'SiO2'

  1. High-speed Deposition of Tetragonal-ZrO2-dispersed SiO2 Nanocomposite Films by Laser Chemical Vapor Deposition L.F. Xu, A. Ito, T. Goto: Materials Letters 154 85–89 (2015).

  2. Dome-like and dense SiC–SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser S. Yu, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 205(8-9) 2818–2822 (2011).

  3. SiC–SiO2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors S. Yu, R. Tu, A. Ito, T. Goto: Materials Letters 64(20) 2151–2154 (2010).

  4. High-Speed Deposition of Y–Si–O Films by Laser Chemical Vapor Deposition Using Nd:YAG laser A. Ito, J. Endo, T. Kimura, T. Goto: Surface and Coatings Technology 204(23) 3846–3850 (2010).

  5. High-speed Deposition of Dense, Dendritic and Porous SiO2 Films by Nd:YAG Laser Chemical Vapor Deposition J. Endo, A. Ito, T. Kimura, T. Goto: Materials Science and Engineering: B 166(3) 225–229 (2010).