Publications

Articles tagged 'AlN'

1. Effects of laser power on the growth of polycrystalline AlN films by laser chemical vapor deposition method Y. You, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 232(15) 1–5 (2013).

2. Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor Y. You, A. Ito, R. Tu, T. Goto: Journal of Crystal Growth 365 1–5 (2013).

3. Effect of NH₃ Atmosphere on Preparation of Al₂O₃-AlN Composite Film by Laser CVD Y. You, A. Ito, R. Tu, T. Goto: Key Engineering Materials 484 172–176 (2011).

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