SiC-SiO2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors

SiC–SiO₂ nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors

S. Yu, R. Tu, A. Ito, T. Goto

Materials Letters 64(20) 2151–2154 (2010).

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