Publications

Articles tagged 'SiC'

1. Effect of deposition atmosphere on the phase composition and microstructure of silicon carbide films prepared by laser chemical vapour deposition R. Hashimoto, A. Ito, T. Goto: Ceramics International 41(5) 6898–6904 (2015).

2. Microstructure and hardness of SiC–TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering G. Osugi, A. Ito, M. Hotta, T. Goto: Thin Solid Films 520(18) 5851–5855 (2012).

3. Dome-like and dense SiC–SiO₂ nanocomposite films synthesized by laser chemical vapor deposition using CO₂ laser S. Yu, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 205(8-9) 2818–2822 (2011).

4. SiC–SiO₂ nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors S. Yu, R. Tu, A. Ito, T. Goto: Materials Letters 64(20) 2151–2154 (2010).

5. Laser Chemical Vapor Deposition of SiC Films with CO₂ laser K. Fujie, A. Ito, R. Tu, T. Goto: Journal of Alloys and Compounds 502(1) 238–242 (2010).

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