Articles tagged 'SiC'

  1. Effect of deposition atmosphere on the phase composition and microstructure of silicon carbide films prepared by laser chemical vapour deposition R. Hashimoto, A. Ito, T. Goto: Ceramics International 41(5) 6898–6904 (2015).

  2. Microstructure and hardness of SiC–TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering G. Osugi, A. Ito, M. Hotta, T. Goto: Thin Solid Films 520(18) 5851–5855 (2012).

  3. Dome-like and dense SiC–SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser S. Yu, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 205(8-9) 2818–2822 (2011).

  4. SiC–SiO2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors S. Yu, R. Tu, A. Ito, T. Goto: Materials Letters 64(20) 2151–2154 (2010).

  5. Laser Chemical Vapor Deposition of SiC Films with CO2 laser K. Fujie, A. Ito, R. Tu, T. Goto: Journal of Alloys and Compounds 502(1) 238–242 (2010).