Articles tagged 'Sputtering'

  1. Microstructure and hardness of SiC–TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering G. Osugi, A. Ito, M. Hotta, T. Goto: Thin Solid Films 520(18) 5851–5855 (2012).

  2. Characterization of calcium titanate thin films deposited on titanium with reactive sputtering and pulsed laser depositions N. Ohtsu, A. Ito, K. Saito, T. Hanawa: Surface and Coatings Technology 201(18) 7686–7691 (2007).