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Moderate temperature and high-speed synthesis of α-Al
2
O
3
films by laser chemical vapor deposition using Nd:YAG laser
H. Kadokura, A. Ito, T. Kimura, T. Goto
Surface and Coatings Technology 204(14) 2302–2306 (2010).
Al2O3
CVD
Orientation
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Accepted manuscript in self-archive
Not available
To be archived
Submitted manuscript
Not available
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