Microstructure and hardness of SiC–TiC nanocomposite thin films prepared by radiofrequency magnetron sputtering

G. Osugi, A. Ito, M. Hotta, T. Goto

Thin Solid Films 520(18) 5851–5855 (2012).

Versions of the article

Final form in publisher

Accepted manuscript in self-archive

Submitted manuscript

Back to full list