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Orientation control of α-Al
2
O
3
films prepared by laser chemical vapor deposition using a diode laser
Y. You, A. Ito, R. Tu, T. Goto
Journal of the Ceramic Society of Japan 118(5) 366–369 (2010).
Al2O3
CVD
Orientation
[Open Access]
Versions of the article
Final form in publisher
Available
as open access
Accepted manuscript in self-archive
Not available
due to the publisher's policy; however, the final form is freely available to read at publisher's site.
Submitted manuscript
Not available
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