Laser chemical vapor deposition of TiN film on Ti(C, N)-based cermet substrate using Ti(OiPr)2(dpm)2-NH3 system

Laser chemical vapor deposition of TiN film on Ti(C, N)-based cermet substrate using Ti(OiPr)₂(dpm)₂–NH₃ system

Y. You, A. Ito, R. Tu, T. Goto

Journal of the Ceramic Society of Japan 199(4) 310–313 (2011).

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