Toggle navigation
itonium.net
About
Publications
Grants & Awards
Effect of Precursor Supply on (100) and (001) Orientations of α-Al
2
O
3
Film Prepared by Laser CVD
K. Hokuto, A. Ito, T. Kimura, T. Goto
Key Engineering Materials 508 3–6 (2012).
Al2O3
CVD
Orientation
[Open Access]
Versions of the article
Final form in publisher
Available
Please note that access to the full text of this article will depend on your personal or institutional entitlements.
Accepted manuscript in self-archive
Available
as open access
Submitted manuscript
Not available
Back to full list