Publications

Articles tagged 'CVD'

  1. High-speed Deposition of Tetragonal-ZrO2-dispersed SiO2 Nanocomposite Films by Laser Chemical Vapor Deposition L.F. Xu, A. Ito, T. Goto: Materials Letters 154 85–89 (2015).

  2. A feather-like structure of β-Al2TiO5 film prepared by laser chemical vapor deposition A. Ito, S. Nishigaki, T. Goto: Journal of the European Ceramic Society 35(7) 2195–2199 (2015).

  3. Synthesis of pseudobrookite titanium oxynitride Ti3−δO4N films by laser chemical vapor deposition A. Ito, H.-S. Joo, T.-S. Kim, T. Goto: Vacuum 116 121–123 (2015).

  4. Effect of deposition atmosphere on the phase composition and microstructure of silicon carbide films prepared by laser chemical vapour deposition R. Hashimoto, A. Ito, T. Goto: Ceramics International 41(5) 6898–6904 (2015).

  5. Preparation of γ-Al2O3 films by laser chemical vapor deposition M. Gao, A. Ito, T. Goto: Applied Surface Science 340 160–165 (2015).

  6. High-speed deposition of highly (001)-oriented SrCO3 films prepared using laser chemical vapor deposition J. Chen, A. Ito, T. Goto: Ceramics International accepted (2015).

  7. Effects of film thickness on the electrical properties of YBa2Cu3O7−δ films grown on a multilayer-coated Hastelloy C276 tape by laser CVD P. Zhao, A. Ito, T. Goto: Journal of Electroceramics accepted (2014).

  8. Orientation control and electrical properties of YBa2Cu3O7−δ deposited onto CeO2 buffer films by laser chemical vapor deposition using liquid source precursors P. Zhao, A. Ito, T. Goto: Thin Solid Films 564(1) 92–96 (2014).

  9. Effect of laser wavelength on phase and microstructure of TiO2 films prepared by laser chemical vapor deposition M. Gao, A. Ito, T. Goto: Surface and Coatings Technology 244(15) 166–172 (2014).

  10. Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition A. Ito, T. Sato, T. Goto: Thin Solid Films 551(31) 37–41 (2014).

  11. Preparation of Al2O3–ZrO2 nanocomposite films by laser chemical vapor deposition A. Ito, Y. You, T. Ichikawa, K. Tsuda, T. Goto: Journal of the European Ceramic Society 34(1) 155–159 (2014).

  12. Effect of deposition temperature on the orientation and electrical properties of YBa2Cu3O7−δ films prepared by laser CVD using liquid-source evaporation P. Zhao, A. Ito, T. Goto: Ceramics International 40(1) 2057–2061 (2014).

  13. Preparation of (100) CeO2 and (110) YBa2Cu3O7−δ films by laser chemical vapor deposition P. Zhao, A. Ito, T. Goto: Ceramics International 40(1) 605–609 (2014).

  14. Laser chemical vapor deposition of single-crystalline transparent CeO2 films P. Zhao, A. Ito, T. Goto: Surface and Coatings Technology 235 273–276 (2013).

  15. Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition A. Ito, Y. You, H. Katsui, T. Goto: Journal of the European Ceramic Society 33(13-14) 2655–2661 (2013).

  16. Effects of laser power on the growth of polycrystalline AlN films by laser chemical vapor deposition method Y. You, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 232(15) 1–5 (2013).

  17. Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition Y. You, A. Ito, T. Goto: Materials Letters 106 11–13 (2013).

  18. Rapid deposition of YBCO films by laser CVD and effect of lattice mismatch on their epitaxial growth and critical temperature P. Zhao, A. Ito, T. Goto: Ceramics International 39 7491–7497 (2013).

  19. High-Jc YBa2Cu3O7−δ superconducting film grown by laser-assisted chemical vapor deposition using a single liquid source and its microstructure P. Zhao, A. Ito, T. Kato, D. Yokoe, T. Hirayama, T. Goto: Superconductor Science and Technology 26 095016 (2013).

  20. Preparation of TiO2-rich Ba–Ti–O thick films by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C. Wang, Q. Shen, L. Zhang: Journal of Advanced Ceramics 2(2) 167–172 (2013).

  21. Preparation of rutile TiO2 thin films by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C. Wang, Q. Shen, L. Zhang: Journal of Advanced Ceramics 2(2) 162–166 (2013).

  22. Effect of laser power on electrical conductivity of BaTi5O11 films prepared by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C. Wang, Q. Shen, L. Zhang: Journal of Materials Science: Materials in Electronics 24(6) 1941–1946 (2013).

  23. Preparation of TiO2 thick film by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C. Wang, Q. Shen, L. Zhang: Journal of Materials Science: Materials in Electronics 24(6) 1758–1763 (2013).

  24. Microstructure and dielectric response of (111)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition D.Y. Guo, A. Ito, R. Tu, T. Goto: Journal of Asian Ceramic Societies 1(2) 197–201 (2013).

  25. High-speed growth of YBa2Cu3O7−δ superconducting films on multilayer-coated Hastelloy C276 tape by laser-assisted MOCVD P. Zhao, A. Ito, T. Kato, D. Yokoe, T. Hirayama, T. Goto: Superconductor Science and Technology 26 055020 (2013).

  26. Effect of laser power on orientation and microstructure of TiO2 films prepared by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C. Wang, Q. Shen, L. Zhang: Materials Letters 93 179–182 (2013).

  27. Preparation of the c-axis oriented AlN film by laser chemical vapor deposition using a newly proposed Al(acac)3 precursor Y. You, A. Ito, R. Tu, T. Goto: Journal of Crystal Growth 365 1–5 (2013).

  28. Transparent Lu3NbO7 bodies prepared by reactive spark plasma sintering and their optical and mechanical properties L.Q. An, A. Ito, T. Goto: Ceramics International 39(1) 383–387 (2013).

  29. High-speed Epitaxial Growth of BaTi2O5 Thick Films and Their In-plane Orientations D.Y. Guo, A. Ito, R. Tu, T. Goto: Applied Surface Science 259 178–185 (2012).

  30. Preparation of (020)-oriented BaTi2O5 thick films and their dielectric responses A. Ito, D.Y. Guo, R. Tu, T. Goto: Journal of the European Ceramic Society 32(10) 2459–2467 (2012).

  31. Preparation of Ti(O,N) Films by Laser Chemical Vapor Deposition for Functionally Gradient Coating on Ti(C,N)-based Cermet T. Yonesaki, A. Ito, T. Goto: Journal of the Japan Society of Powder and Powder Metallurgy 59(7) 405–409 (2012).

  32. Effect of laser power on microstructure and dielectric properties of BaTi5O11 films prepared by laser chemical vapor deposition method D.Y. Guo, A. Ito, T. Goto, R. Tu, C.B. Wang, Q. Shen, L. Zhang: Journal of Materials Science: Materials in Electronics 23(11) 1961–1964 (2012).

  33. Effect of Precursor Supply on (100) and (001) Orientations of α-Al2O3 Film Prepared by Laser CVD K. Hokuto, A. Ito, T. Kimura, T. Goto: Key Engineering Materials 508 3–6 (2012).

  34. Microcolumnar and Granular Structures of TiO2 Films Prepared by Laser CVD using Nd:YAG Laser M. Gao, A. Ito, R. Tu, T. Goto: Key Engineering Materials 508 287–290 (2012).

  35. Preparation of Titania Solid Films by Laser CVD using CO2 Laser M. Gao, A. Ito, R. Tu, T. Goto: Key Engineering Materials 508 279–282 (2012).

  36. Preparation of c-axis-oriented Y2Ba4Cu7O15−δ Films by Laser CVD with Ultrasonically Nebulized Precursor A. Ito, M. Sato, T. Goto: Key Engineering Materials 508 207–210 (2012).

  37. Ba2TiO4 and Ba4Ti13O3O Thick Films Prepared by Laser Chemical Vapor Deposition and Their Microstructure D.Y. Guo, A. Ito, R. Tu, T. Goto: Key Engineering Materials 508 199–202 (2012).

  38. Growth of b-axis-oriented BaTi2O5 Nanopillars by Laser Chemical Vapor Deposition D.Y. Guo, A. Ito, R. Tu, T. Goto: Key Engineering Materials 508 185–188 (2012).

  39. Preparation of Ba–Ti–O films by Laser Chemical Vapor Deposition A. Ito, D.Y. Guo, R. Tu, T. Goto: Materials Chemistry and Physics 133(1) 398–404 (2012).

  40. Dielectric properties of Ba4Ti13O3O film prepared by laser chemical vapor deposition D.Y. Guo, A. Ito, T. Goto, R. Tu, C.B. Wang, Q. Shen, L. Zhang: Journal of Materials Science 47(3) 1559–1561 (2012).

  41. Rh-nanoparticle-dispersed ZrO2 films prepared by laser chemical vapor deposition A. Honda, T. Kimura, A. Ito, T. Goto: Surface and Coatings Technology 206(11-12) 3006–3010 (2012).

  42. Preparation of LaRuO3 Films by Microwave Plasma-enhanced Chemical Vapor Deposition M. Kimura, A. Ito, T. Kimura, T. Goto: Thin Solid Films 520(6) 1847–1850 (2012).

  43. Fabrication of transparent Lu3NbO7 by spark plasma sintering L.Q. An, A. Ito, T. Goto: Materials Letters 65(19-20) 3167–3169 (2011).

  44. (006)-oriented α-Al2O3 films prepared in CO2–H2 atmosphere by laser chemical vapor deposition using a diode laser Y. You, A. Ito, R. Tu, T. Goto: Materials Science and Engineering: B 176(13) 984–989 (2011).

  45. Preparation of α-Al2O3/TiN Multilayer Coating on Ti(C,N)-Based Cermet by Laser CVD Y. You, A. Ito, R. Tu, T. Goto: Key Engineering Materials 484 188–191 (2011).

  46. Ternary Phase Relation on Preparation of YBa2Cu3O7−δ Films by Laser CVD P. Zhao, A. Ito, R. Tu, T. Goto: Key Engineering Materials 484 183–187 (2011).

  47. Effect of NH3 Atmosphere on Preparation of Al2O3-AlN Composite Film by Laser CVD Y. You, A. Ito, R. Tu, T. Goto: Key Engineering Materials 484 172–176 (2011).

  48. Deposition of α-Al2O3 films on Ti(C, N)-based cermet substrate by laser chemical vapor deposition using a diode laser Y. You, A. Ito, R. Tu, T. Goto: Journal of the Ceramic Society of Japan 119(7) 570–572 (2011).

  49. High-speed epitaxial growth of (100)-oriented CeO2 film on r-cut sapphire by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 205(16) 4079–4082 (2011).

  50. Laser chemical vapor deposition of TiN film on Ti(C, N)-based cermet substrate using Ti(OiPr)2(dpm)2–NH3 system Y. You, A. Ito, R. Tu, T. Goto: Journal of the Ceramic Society of Japan 199(4) 310–313 (2011).

  51. Fast epitaxial growth of a-axis- and c-axis-oriented YBa2Cu3O7−δ films on (100) LaAlO3 substrate by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Applied Surface Science 257(9) 4317–4320 (2011).

  52. Dome-like and dense SiC–SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser S. Yu, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 205(8-9) 2818–2822 (2011).

  53. Eggshell- and Fur-like Microstructures of Yttria Silicate Film Prepared by Laser Chemical Vapor Deposition A. Ito, J. Endo, T. Kimura, T. Goto: Materials Chemistry and Physics 125(1-2) 242–246 (2011).

  54. High-speed growth of YBa2Cu3O7−δ film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Superconductor Science and Technology 23(12) 125010 (2010).

  55. SiC–SiO2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors S. Yu, R. Tu, A. Ito, T. Goto: Materials Letters 64(20) 2151–2154 (2010).

  56. High-Speed Deposition of Y–Si–O Films by Laser Chemical Vapor Deposition Using Nd:YAG laser A. Ito, J. Endo, T. Kimura, T. Goto: Surface and Coatings Technology 204(23) 3846–3850 (2010).

  57. Preparation of highly (100)-oriented CeO2 films on polycrystalline Al2O3 substrates by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 204(21-22) 3619–3622 (2010).

  58. Influence of laser power on the orientation and microstructure of CeO2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Applied Surface Science 256(21) 6395–6398 (2010).

  59. Laser Chemical Vapor Deposition of SiC Films with CO2 laser K. Fujie, A. Ito, R. Tu, T. Goto: Journal of Alloys and Compounds 502(1) 238–242 (2010).

  60. Orientation control of α-Al2O3 films prepared by laser chemical vapor deposition using a diode laser Y. You, A. Ito, R. Tu, T. Goto: Journal of the Ceramic Society of Japan 118(5) 366–369 (2010).

  61. Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser H. Kadokura, A. Ito, T. Kimura, T. Goto: Surface and Coatings Technology 204(14) 2302–2306 (2010).

  62. Amorphous-like nanocrystalline γ-Al2O3 films prepared by MOCVD A. Ito, R. Tu, T. Goto: Surface and Coatings Technology 204(14) 2170–2174 (2010).

  63. Low temperature deposition of α-Al2O3 films by laser chemical vapor deposition using a diode laser Y. You, A. Ito, R. Tu, T. Goto: Applied Surface Science 256(12) 3906–3911 (2010).

  64. High-speed Deposition of Dense, Dendritic and Porous SiO2 Films by Nd:YAG Laser Chemical Vapor Deposition J. Endo, A. Ito, T. Kimura, T. Goto: Materials Science and Engineering: B 166(3) 225–229 (2010).

  65. High-speed preparation of c-axis-oriented YBa2Cu3O7−δ film by laser chemical vapor deposition P. Zhao, A. Ito, R. Tu, T. Goto: Materials Letters 64(1) 102–104 (2010).

  66. Texture and orientation characteristics of α-Al2O3 films prepared by laser chemical vapor deposition using Nd:YAG laser A. Ito, H. Kadokura, T. Kimura, T. Goto: Journal of Alloys and Compounds 489(2) 469–474 (2010).

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